AXCELIS - EATON

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Part Number OEM Description Quantity
000-5067-01 AXCELIS TECHNOLOGIES MOTOR ASSY (000-6224-02) REV.D 9610 SEI (9GAC4239) 5
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0141-0019-0001 AXCELIS TECHNOLOGIES ACTUATOR ROTARY DOUBLE ACTING 18 IN. LBS. 1
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0161-0102-0001 AXCELIS TECHNOLOGIES HUB, TRANSFER ARM ADAPTER, 8250 1
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0295-0016-1001 AXCELIS TECHNOLOGIES APERTURE SHUTTER UPSTREAM 3/8" SLOT GRAPHITE 3
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0295-0017-2001 AXCELIS TECHNOLOGIES APERTURE SHUTTER DOWNSTREAM 3/8" SLOT ALUM 2
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0295-0080-0001 AXCELIS TECHNOLOGIES APERTURE,ENTRANCE,ELECTROST 5
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0295-0081-0001 AXCELIS TECHNOLOGIES APERTURE,MID,ELECTROSTATIC 4
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0295-0082-0001 AXCELIS TECHNOLOGIES APERTURE,EXIT,ELECTROSTATIC 3
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0298-0124-0001 AXCELIS TECHNOLOGIES ARM LOAD CHAMBER INTL W F FLG 6IN. 6200-A-AV HIREL 1
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0298-0124-0001(LOT OF 4) AXCELIS TECHNOLOGIES ARM LOAD CHAMBER INTL W F FLG 6IN. 6200-A-AV HIREL 1
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0298-0169-0001 AXCELIS TECHNOLOGIES ARM, CAM, TRANSFER ARM, 8250 1
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0342-0594-3001 AXCELIS TECHNOLOGIES PCB ASSY WAFER SENSOR 1
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0342-0607-4001 AXCELIS TECHNOLOGIES A19 SCAN GENERATOR PCB AXCELIS 0303-0019 0301-0196 1
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0342-0684-4001 AXCELIS TECHNOLOGIES PCB ASSY I/O CARD ACK INTERFACE 1
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0342-0908-0001 AXCELIS TECHNOLOGIES PCB ASSEMBLY SOURCE TERM DATA LINK NV4200 NV6200 1
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0342-1054-0001 AXCELIS TECHNOLOGIES FRONT PANEL I/O K-7 1
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0342-1403-0002 AXCELIS TECHNOLOGIES ELECTRONIC MDL ASSY SCAN AMP 1
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0342-1432-0001 AXCELIS TECHNOLOGIES FILAMENT SUPPLY ASSY MOD DTC 1
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0342-1433-0001 AXCELIS TECHNOLOGIES SOURCE GAS CONT ASSY MOD DTC 1
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0342-1449-0001 AXCELIS TECHNOLOGIES MAGNET LNR ASSY OUTER RADIUS 2
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