Repairs

GetSpares offers repairs on critical parts needed for your manufacturing equipment. Parts are offered with an exchange of the same part. This allows you to quickly bring your down equipment back into production and allows us to have ready-for-sale, repaired parts in stock. Repairs are done in-house or through strategic partnerships to allow for a wide range of repairable parts offered. All repairs are tracked through our internal inventory system to know status and location real time.

DNS 60A 80A 80B SK-200

  • 2-39-37740 STEPPING MOTOR, UPHS64-B-A25, DNS 60A
  • 2-39-45431 CP CONTROLLER FOR COOLING PLATE FRD-4
  • 2-39-45432 PWR SUPPLY, CHILL PLATE CONTROLLER, MR-2015A, DNS 80B
  • 2-39-45543 MOTOR, SPIN, DNS 80B
  • 2-39-48133 SERVO AMPLIFIER SPIN MOTOR DRIVE AU3575N223 EESA-001
  • 2-39-48602 FC-9821KE, MAIN CONTROLLER, NEC, DNS 80B CEML-001 2-VC-1075-1 2-VC-09976
  • 2-39-51930 2-39-61074 MAIN PANEL UT3-F1AE DSS-DNS200 TOUCHSCREEN
  • 2-39-53462 SERVO AMPLIFIER, SPIN MOTOR DRIVE, AU6356N20, DNS 80B
  • 2-39-55387 ARM, VACUUMLESS, CERAMIC, 150MM, IDA
  • 2-39-74930 TAMAGAWA 3510N45E10 MOTOR AC SERVO
  • 2-VC-09977 PARALLEL I/O PCB, CEMI-0011
  • 2-VC-15485 8AXIS MTR DRVR TRANS UNIT D2102 EEKA-001 MR-J10A-S07 DNS 80B
  • 2-VC-16147 UEEW, EEEC-002
  • 2-VC-16217 HEATER CONTROLLER EEBH-0021/EEBH-0011X1
  • 2-VC-18166 IF-B PCB, EEIB-001
  • 2-VC-18987 EEW PCB, SLOT 6/7, EEUC-0013, DEEW
  • 2-VC-19075 CESB-0012, SPIN CONTROL, DNS 80A/80B 2-VC-19075 CESB-2011
  • 2-VC-19090 TRANSPORT PCB, SLOT 2, EERC-0011, AP-1353A DNS 80B
  • 2-VC-19284 IF-B PCB, EEIC-001
  • 2-VC-20700 I/O UNIT CEMB-0015
  • 2-VC-27621 GESA-001 SERVO AMPLIFIER, AU6354N40
  • 2-VC-34885 DRIVER DNS 80B OR EEBH-6011
  • 3L135 INTERFACE CONTROLLER 12V POWER
  • 5022P1B EEYC-0011 POWER SUPPLY FOR CARD CAGE DNS 80B
  • CEBB-1011 BAKE DNS 60A SIMILAR TO 2-VC-13736
  • CECC-2011 PLC DNS 60A 2-VC-09866-1 TANK CHANGE CONTROLLER
  • CECC-201X4 TANK CHANGE CONTROLLER DEVELOPER DNS 60A
  • CEDB-1013 2-VC-15252 INDEXER PCB ID - A/B/C DNS 80A CEDB-0011
  • CEHC-0019 HEATER CONTROLLER Serial No. IGI1003A
  • CEHC-0016 HEATER CONTROLLER Serial No. ICH2002A
  • CEIB-1011 IF-A PCB 60A SIMILAR TO 2-VC-15260 SLOT 1
  • CEML-0011 DNS COMMUNICATION PCB DNS 80A
  • CEPB-0014 POWER SUPPLY BREAKER ASSY DNS 60A
  • CERB-0016 2-VC-15254 TRANSPORT PCB DNS 80A
  • CESA-0013 SERVO AMPLIFER Serial No. 001494
  • CESA-804 DRIVER (R) MOTOR BOX SERVO PK DNS 80A/CACR-03-DS3BUH
  • CESP-0002 COAT MAINTENANCE PANEL (5 CONNECTOR STYLE WITH SCN5)
  • CESP-0012 MAINTENANCE PANEL DNS 80B 4-CON SCN4
  • CESP-0017 MAINTENANCE PANEL DNS 80B 5-CON SCN5
  • CESP-0018 MAINTENANCE PANEL DNS 80B 4-CON SCN4 DEVELOP
  • CESP-001A MAINTENANCE PANEL DNS 80B 4-CON SCN4
  • CESP-002 MAINTENANCE PANEL DNS 80B 5-CON SCN5
  • CEYD-0015 2-VC-13743 SUPPLY, POWER SUPPLY, DC
  • D2480-1 GEIA-001/2-VC-28124
  • EEBC-0012 BAKE PCB 2-VC-19116 DNS 80B, SLOT 8, AP-1352A
  • EEJA-001A1 MULTI AXIS DRIVER WITH Z CONTROL
  • EEKA-0011 ID-A TRANSPORT UNIT 2-VC-23936, 2-VC-15485, MR-J10-S07
  • EEMP-0013 LCD MONITOR FOR DNS 80B TRACKS
  • EEMP-0021X3 OPERATOR INTERFACE
  • EEPB-002 BREAKER BOX AC100V AC200V DNS 60A
  • EESC-0012 SPIN PCB 2-VC-19115 DNS 80B, SLOT 3/4/5, AP-1351A
  • EEUD-0013 SENSOR AMPLIFIER
  • EEUE-001 EEW UNIT DNS 80B
  • EEYC-0011 STATION CONTROLLER, DNS 80B, 2-VC-16708
  • FC-9801A FACTORY MAIN COMPUTER DNS 60A
  • FC-9821Ka FC-9821KA MODEL 1 MAIN CONTROLLER NEC DNS 80A
  • HA-FE23D AC SERVO MOTOR DNS 80B HORIZONTAL Y AXIS DRIVE
  • INR-244-402 THERMO CONTROLLER FOR CIRCULATOR PUMP, 2-39-45751
  • INR-244-404 PUMP CIRCULATOR PUMP
  • INR-244-412 CIRCULATOR UNIT, CHEM TEMP CONTL, 2-39-53863
  • IPC51/596 UPIBOC-I INDUSTRIAL PC
  • L6001-01 HAMAMATSU LAMP HOUSE REBUILD DNS 80B
  • L6299-12 HAMAMATSU EEW L6299-12 UV-SPOT LIGHT SOURCE
  • L6599-01 LAMPHOUSE, EEW DNS 80B 2-39-83273, UV-SPOT LIGHT SOURCE
  • UDX5107N VEXTA 5-PHASE DRIVER
  • UPH596-B 5-PHASE STEPPING MOTOR

GASONICS L3510 PEP-3510

  • 16495-01 I/O Interface PCB
  • 001-1070-02 Brooks Z-bot Robot Interface PCB
  • 95-0537 Gas Box Controller (mini)
  • 95-0547 Microwave Controller (mini)
  • 95-3157 Misc. Controller (mini)
  • LCD Monitor (replaces obsolete LCD)
  • CPU/Hard Drive Upgrade (replaces hard drive with Dual Raid or CF card)

KLA-TENCOR 8100 8200 8300 CD SEM

  • 880-50510 Electron Source, KLA 8100
  • 780-13204-000 Schottky Gun Controller Chassis
  • 720-05721-000 Column Control Chassis
  • 780-13183-000 TFE Gun Controller Chassis
  • 720-06139-001 ETDC Controller Chassis
  • 780-14688-000 Wien Filter Controller Chassis
  • 780-13181-000 DC Distribution Chassis
  • 471-12116-000 ESC-212 Robot Controller
  • 471-07384-000 ATM-105 Robot - 7.1" CE S293
  • 780-08364-000 ATM Robot - 10" Universal
  • 471-12116-000 Robot Controller Universal ESC-212
  • 780-14810-000 Robot Controller Universal ESC-212
  • 471-08424-000 Pre-aligner PRE-200
  • X-Y Motors
  • Lasers

NOVELLUS C-1

  • 19-00128-01 CPU Board (slot 2)
  • 19-00130-00 Serial I/O Daughter Board (slot 2A)
  • 19-00122-00 RAM Board (slot 3)
  • 19-00157-00 Digital I/O Board (slot 4-5)
  • 19-00126-00 Analog Input Board (slot 6)
  • 19-00136-00 Analog Output Board (slot 7-8)
  • 19-00123-00 Motor Indexer Board (slot 10-12)
  • 02-00150-00 Multibus Power Distribution Board (Backplane PCB)
  • 02-00072-00 Terminal Panel 150mm Classic Board
  • 02-00374-00 Terminal Panel 150mm, 200m, New Generation
  • 27-00009-00 Throttle Valve Controller (Tylan AC2)
  • 27-00142-00 Valve Display Controller (Tylan Mykrolis ACR-28)
  • 02-00172-00 Heater Monitor Board
  • 02-00093-00 Robot, One Arm (rebuilt, cycled, adjusted in our Novellus C-1)
  • 02-00269-00 Robot Arm (without paddle and bracket)
  • 02-00315-00 Sense Pin Assembly Board
  • Banner Amplifier Board (Fits on cassette door shroud)

PROMETRIX RS-35 RS-55 RS-75

  • 54-0006 Analog Relay PCB
  • 54-0014 DVM PCB
  • 54-0005 Current Supply PCB
  • 54-0057 Power Supply PCB
  • 54-0046 Motor Controller PCB
  • 54-0049 Parallel I/O PCB
  • 54-0252 Analog I/O Temp PCB
  • 53-0001 CPU RSXX PCB