Search Our Inventory. Find Your Part.

GetSpares has an extensive supply of original NOS (new-old-stock), like-new, used, and refurbished parts for all types of industries, including semiconductor, high technology, scientific, and industrial manufacturing businesses. We carry many of today's most trusted OEMs, including ASML, AMAT (Applied Materials), KLA-Tencor, LAM, and many more. No matter what you are looking for, from a mass flow controller to parts that service a KLA 8100, we can help you keep your tools up and running.

Looking for a Specific Part?

To browse our online parts catalog, simply type in a number or description of what you looking for, choose the OEM if you know it, and hit the "search" button. If you cannot easily find your part or need a cross-reference for a part number, just contact us and we will help.

Part Number Description OEM

Looking for Many Parts?

Maybe you need to restock your supply with parts for many machines or need many parts for a specific type on stock for maintenance. Whatever the case, if you have a list of parts you need, we can help. We have internal batch look-up capability and can turn around a list of available inventory in a short amount of time.