BROOKS AUTOMATION

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Part Number OEM Description Quantity
0002-7800-02 BROOKS AUTOMATION LOAD PORT - KLA EVE 300 5
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0002461-000 BROOKS AUTOMATION ROBOT / CONTROLLER TEST STAND 1
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001-000-41 BROOKS AUTOMATION ORBITRAN Z-BOT 1
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001-0000-27 BROOKS AUTOMATION Z-BOT WAFER INDEXER (WITH DRIVER BOARD) 5
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001-0000-27 ROBOT BROOKS AUTOMATION Z-BOT ROBOT L3510 6
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001-0000-39 BROOKS AUTOMATION Z-BOT, WAFTER HANDLING TRANSFER ROBOT, GASONICS L3510 1
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001-0000-41 BROOKS AUTOMATION Z-BOT WAFER INDEXER 6
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001-0000R41 BROOKS AUTOMATION Z-BOT WAFER INDEXER 1
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001-0080-08 BROOKS AUTOMATION ALIGNER ASSY SOLD OUT
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001-05208-002 BROOKS AUTOMATION MANO. PORT PLUG VESPEL SP SOLD OUT
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001-1056-01 BROOKS AUTOMATION PIN SOLD OUT
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001-1070-02 BROOKS AUTOMATION Z-BOT CONTROL PCB 14
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001-1299-06 BROOKS AUTOMATION ACTUATOR ACTUATOR ASSEMBLY 4
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001-1383-06 BROOKS AUTOMATION MOTOR MTR5 ROBOT THEA 1
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001-1385-03 BROOKS AUTOMATION MOOG DC MOTOR HEDS-5540 ENCODER 001-7600-02 1
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001-1508-01 BROOKS AUTOMATION MTR5 Z-AXIS MTR BREAK SOLD OUT
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001-1570-97 BROOKS AUTOMATION ARMS BROOKS ROBOT FROG LEGS 1
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001-1611-01 BROOKS AUTOMATION CABLE FOR 001-7600-02 1
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001-1863-01 BROOKS AUTOMATION CDM CABLE 1
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001-1865-01 BROOKS AUTOMATION COMMUNICATION CABLE 1
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