TRIKON/SPTS TECHNOLOGY

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Part Number	OEM	Description	Quantity
11877	TRIKON/SPTS TECHNOLOGIES	O-RING KIT, PV16 VALVE, AS-568A, 31032	3	Get Quote
152124D04	TRIKON/SPTS TECHNOLOGIES	COUPLING ASSEMBLY H202	4	Get Quote
152511B05	TRIKON/SPTS TECHNOLOGIES	FLOWFILL PLASMA, INSULATING RING	3	Get Quote
152523D02	TRIKON/SPTS TECHNOLOGIES	PLASMA THERMOCOUPLE ISOLATOR	2	Get Quote
152524	TRIKON/SPTS TECHNOLOGIES	PLASMA THERMOCOUPLE SHEATH	2	Get Quote
152560C02	TRIKON/SPTS TECHNOLOGIES	FLOWFILL PLASMA CLAMP RING HALF	4	Get Quote
152567C02	TRIKON/SPTS TECHNOLOGIES	HEATER ELEMENT (CED136-0085TF, GR-4740)	1	Get Quote
152616D02	TRIKON/SPTS TECHNOLOGIES	PLASMA ISOLATOR 1	2	Get Quote
152617D02	TRIKON/SPTS TECHNOLOGIES	PLASMA ISOLATOR	7	Get Quote
152618D02	TRIKON/SPTS TECHNOLOGIES	PLASMA ISOLATING PEG	9	Get Quote
152660	TRIKON/SPTS TECHNOLOGIES	SHOWERHEAD ASSY	6	Get Quote
152663	TRIKON/SPTS TECHNOLOGIES	THERMOCOUPLE ASSEMBLY	1	Get Quote
152664B04	TRIKON/SPTS TECHNOLOGIES	PLASMA BAFFLE PLATE	6	Get Quote
152721D02	TRIKON/SPTS TECHNOLOGIES	SERVICE AID-SHOWERHEAD	2	Get Quote
152727	TRIKON/SPTS TECHNOLOGIES	ADJUSTING SCREW	1	Get Quote
152754	TRIKON/SPTS TECHNOLOGIES	ASSEMBLY THERMOCOUPLE	1	Get Quote
152785	TRIKON/SPTS TECHNOLOGIES	SUPPORT RING 150MM	2	Get Quote
153929	TRIKON/SPTS TECHNOLOGIES	SPATULA BLADE 150MM, 4012760-0001	2	Get Quote
154528D03	TRIKON/SPTS TECHNOLOGIES	DOWEL PIN	4	Get Quote
154537C01	TRIKON/SPTS TECHNOLOGIES	UNIFORMITY RING, PLASMA ICS-154537, GR-5353	14	Get Quote

Part Number	Description	OEM